Thermal spraying Job Shop
Sputtering Target
Sputtering targets for sputtering equipment may be manufactured by Thermal Spray or Cold Spray
Some applications, especially for cylindrical targets when bonding to backing tubes are difficult, lengthy, high melting point metals eg niobium, tantalum which can not be casted
(Max work size: L4,000 x Ø160mm, for an example)
| Types of thermal spraying | Plasma thermal spray Cold spray |
| Substrate | SS grade 304, Titanium, Copper |
| Applications | Low e window glass application, Optical film application and others |
Some thermal sprayed examples
Cu sputtering target
| Type of thermal spraying | Cold spray |
| Sprayed material | Cu |
| Purpose of thermal spraying | Substrate for sputtering |
| Substrate | Stainless steel |
| Remarks | Thermal spray coating thickness: max 9mm, Substrate size: Ø200, L750mm to max 3,800mm |
Ni cylindrical target
| Type of thermal spraying | Cold spray |
| Sprayed material | Zn, Zn-Al alloy, Sn, Sn-Zn alloy,Ni, Ti, Al, Cu, Ag, etc. |
| Substrate | Stainless steel, titanium, cupper, etc. |
| Remarks | Post processes: Lathe manufacturing and milling Target length max 4m is possible to produce. Touch up is possible |
Al sputtering target
| Type of thermal spraying | Cold spray |
| Sprayed material | Al |
| Purpose of thermal spraying | Substrate for sputtering |
| Substrate | Stainless steel |
| Remarks | Thermal spray coating thickness: max 7mm, Substrate size: Ø200, L750mm to max 3,800mm |
Ni plate target
| Type of thermal spraying | Cold spray |
| Sprayed material | Ni |
| Purpose of thermal spraying | Planer type substrate for sputter target |
| Substrate | Stainless steel |
| Remarks | Thermal spray coating thickness: max approx 16mm, Substrate size: Ø200, L1,600mm to max 3,800mm |
Zn-2Al sputtering target
| Type of thermal spraying | Cold spray |
| Sprayed material | Zn-2Al |
| Purpose of thermal spraying | Substrate for sputtering |
| Substrate | Stainless steel |
| Remarks | Thermal spray coating thickness: max approx 16mm, Substrate size: Ø200, L3,20mm to max 3,800mm |
Ti sputtering target
| Type of thermal spraying | Cold spray |
| Sprayed material | Ti |
| Purpose of thermal spraying | Substrate for sputtering |
| Substrate | Stainless steel |
| Remarks | Thermal spray coating thickness: max approx 16mm, Substrate size: Ø200, L3,20mm to max 3,800mm |
Ag large size sputtering target
| Type of thermal spraying | Cold spray |
| Sprayed material | Ag, Ag alloy |
| Purpose of thermal spraying | Substrate for sputtering |
| Substrate | Stainless steel |
| Remarks | Thermal spray coating thickness: max approx 16mm, Substrate size: Ø200, L3,20mm to max 3,800mm |
Ag small size sputtering target
| Type of thermal spraying | Cold spray |
| Sprayed material | Ag, Ag alloy |
| Purpose of thermal spraying | Substrate for sputtering |
| Substrate | Stainless steel |
| Remarks | Thermal spray coating thickness: max approx 7mm, Substrate size: Ø65, L350mm to max 3,800mm |
TiO2 sputtering target
| Type of thermal spraying | Plasma Thermal Spray at atmospheric pressure |
| Sprayed material | Titanium oxide |
| Purpose of thermal spraying | Substrate for sputtering |
| Substrate | Stainless steel, titanium |
| Remarks | Thermal spray coating thickness: max approx 6mm, Substrate size: Ø180, L750mm to max 3,800mm |
Si sputtering target
| Type of thermal spraying | Plasma Thermal Spray at atmospheric pressure |
| Sprayed material | Si, Si-Al blending ratio at any % |
| Purpose of thermal spraying | Sputtering target substrate |
| Substrate | Stainless steel, titanium |
| Remarks | Thermal spray coating thickness: max approx 10mm, Substrate size: Ø65, L350mm to max 3,800mm |